JPH04749U - - Google Patents
Info
- Publication number
- JPH04749U JPH04749U JP3905990U JP3905990U JPH04749U JP H04749 U JPH04749 U JP H04749U JP 3905990 U JP3905990 U JP 3905990U JP 3905990 U JP3905990 U JP 3905990U JP H04749 U JPH04749 U JP H04749U
- Authority
- JP
- Japan
- Prior art keywords
- rotating shaft
- arms
- changing jig
- wafer
- wafer changing
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Jigs For Machine Tools (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3905990U JPH0635471Y2 (ja) | 1990-04-13 | 1990-04-13 | ウエーハ持ち替え用治具 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3905990U JPH0635471Y2 (ja) | 1990-04-13 | 1990-04-13 | ウエーハ持ち替え用治具 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH04749U true JPH04749U (en]) | 1992-01-07 |
| JPH0635471Y2 JPH0635471Y2 (ja) | 1994-09-14 |
Family
ID=31547622
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP3905990U Expired - Lifetime JPH0635471Y2 (ja) | 1990-04-13 | 1990-04-13 | ウエーハ持ち替え用治具 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0635471Y2 (en]) |
-
1990
- 1990-04-13 JP JP3905990U patent/JPH0635471Y2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0635471Y2 (ja) | 1994-09-14 |